Title:
METHOD AND EQUIPMENT FOR DISCHARGING EXHAUST GAS IN CLEAN ROOM
Document Type and Number:
Japanese Patent JPH0783471
Kind Code:
A
Abstract:
PURPOSE: To make it possible to discharge an exhaust gas in a prescribed state substantially irrespective of the state of operation of a plurality of drafts provided in a clean room.
CONSTITUTION: A pressure sensor 31 detecting the pressure of an exhaust gas being sucked is provided on the inlet side of an exhaust fan 14 sucking the exhaust gas from drafts 12a to 12b and sending it, while a pressure controller 32 and an inverter 33 are provided as air quantity control means which maintain the pressure detected by the pressure sensor 31 to be prescribed substantially, and the quantity of exhaust air of the exhaust fan 14 is controlled so that the pressure on the inlet side of the exhaust fan 14 be maintaned to be prescribed substantially.
Inventors:
ISHIHARA YOSHIO
AKUTSU NAKAO
TSUBOUCHI TOSHIHIRO
AKUTSU NAKAO
TSUBOUCHI TOSHIHIRO
Application Number:
JP22876593A
Publication Date:
March 28, 1995
Filing Date:
September 14, 1993
Export Citation:
Assignee:
NIPPON OXYGEN CO LTD
International Classes:
F24F7/007; F24F7/06; (IPC1-7): F24F7/007; F24F7/06
Attorney, Agent or Firm:
Kazuhiko Kido (1 person outside)
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