Title:
METHOD AND EQUIPMENT FOR FORMING REINFORCING FILM ON SUBSTRATE, AND SOLAR BATTERY
Document Type and Number:
Japanese Patent JP3910075
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce manufacturing cost without deteriorating reliability of a product using a substrate by reducing cracks in a course of dealing the breakable thin substrate.
SOLUTION: In one embodiment, a method for forming a reinforcing film on a prescribed region on the substrate (1) contains a process wherein a first film (2) is formed outside the prescribed region by using first liquid material, and a second film (3) turning to the reinforcing film is formed on a region inside the first film (2) by using second liquid material whose wettability to the substrate (1) is superior and whose wettability to the substrate (2) is inferior. In the other embodiment, the method for forming the reinforcing film on the prescribed region on the substrate contains a process wherein a third film is formed on the prescribed region by using third liquid material, and a fourth film turning to the reinforcing film is formed on the whole region of the third film by using fourth liquid material whose wettability to the substrate is inferior and whose wettability to the third film is superior.
Inventors:
Hideo Okada
Katsumi Yamaguchi
Hiroshi Akama
Hisashi Mogami
Katsumi Yamaguchi
Hiroshi Akama
Hisashi Mogami
Application Number:
JP2002032769A
Publication Date:
April 25, 2007
Filing Date:
February 08, 2002
Export Citation:
Assignee:
Sharp Corporation
Origin Electric Co., Ltd.
Origin Electric Co., Ltd.
International Classes:
B05D1/26; H01L31/04; B05C1/02; B05D1/36; B05D3/06; B05D7/00; H01M14/00; (IPC1-7): H01L31/04; B05C1/02; B05D1/26; B05D1/36; B05D3/06; B05D7/00; //H01M14/00
Domestic Patent References:
JP10027748A | ||||
JP7273001A | ||||
JP9246173A | ||||
JP59036923A | ||||
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JP2001191025A | ||||
JP2041894B2 | ||||
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Attorney, Agent or Firm:
Kuro Fukami
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