To provide a method and an equipment for heat treatment in which a set treating temperature can be returned back quickly when the temperature of an article to be treated is varied.
In the heat treating method where a heating source is disposed on the other end side of a reaction tube having an inlet/outlet at one end and an article to be treated is advanced into the reaction tube from the inlet/outlet and located at a set position corresponding to a set treating temperature, position of the article to be treated relative to the heating source is altered when actual treating temperature at the set position is varied during heat treatment of the article to be treated the actual treating temperature is matched with the set treating temperature. The heat treating equipment comprises a reaction tube, a heating source disposed on the upper end side of the reaction tube, means for moving the article to be treated, means for detecting the temperature of the article to be treated, and a section for controlling the moving means to vary the position of the article to be treated relative to the heating source when the treating temperature is varied during heat treatment of the article to be treated.
YAGI YASUSHI
KAWACHI SATOSHI
