PURPOSE: To enhance reliability in the decision of pass/fail of an oscillator while automating the deciding operation by constituting a section for detecting oscillation of the oscillator of an optical noncontact oscillation sensor and a section for controlling the mirror system to switch the optical path in order to determine the oscillation of the oscillator in a plurality of directions.
CONSTITUTION: An optical noncontact oscillation sensor 21a (laser Doppler system noncontact vibrometer) is employed as a detecting section 21, and a section 27 controls the mirror system to switch the optical path in order to determine the oscillation of an oscillator A in a plurality of directions. The switching section 27 comprises a movable mirror 29 for deflecting the light of the sensor 21a, and a plurality of fixed mirrors 281-285 for deflecting the light toward the oscillator A. Drive control of the mirror 29 is performed at an inspection sequence control section 26. A waveform extracting section 22 comprises a frequency analyzing circuit and a circuit for operating peak value or peak factor. Since feature element values are subjected to combinational operation and pass/fail of the oscillator is decided, the decision can be made automatically.
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KUSADA KOJI
YAMANAKA HIROSHI
