Title:
METHOD AND EQUIPMENT FOR MEASURING PERFORMANCE OF FOCUS OPTICAL SYSTEM
Document Type and Number:
Japanese Patent JP3728187
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method and an equipment for measuring the performance of a focus optical system in which distortion of a focus optical system and curvature of an image plane can be measured easily with high accuracy.
SOLUTION: The equipment for measuring the performance of a focus optical system using an interferometer comprises an interferometer for measuring the transmission wave front at a plurality of measuring points of the focus optical system, means for measuring the coordinate of the plurality of measuring points on the object side and the image side, means for calculating the inclination component and defocus component of a measured transmission wave front, and means for calculating distortion of the focus optical system and curvature of the image plane from the defocus component and the coordinate of the points. Distortion of the focus optical system at other measuring points and correction of the focal plane are performed with reference to distortion and aging of the focal plane at a reference point determined among the plurality of measuring points.
Inventors:
Kuramoto Fukuyuki
Application Number:
JP2000208680A
Publication Date:
December 21, 2005
Filing Date:
July 10, 2000
Export Citation:
Assignee:
Canon Inc
International Classes:
G01M11/02; G03F7/20; G01B9/02; (IPC1-7): G01M11/02; G01B9/02
Domestic Patent References:
| JP9096589A | ||||
| JP10038757A |
Attorney, Agent or Firm:
Yukio Takanashi