Title:
METHOD FOR EVALUATING OUTPUT SIGNALS FROM TWO PRESSURE SENSORS, PRESSURE MEASURING DEVICE EQUIPPED WITH TWO PRESSURE MEASURING SENSORS AND PRESSURE MEASURING HEAD WITH SUCH DEVICE
Document Type and Number:
Japanese Patent JP3585969
Kind Code:
B2
Abstract:
PURPOSE: To accurately measure continuously a measuring area wider than the measuring area of each sensor element, by combining a plurality of pressure sensors.
CONSTITUTION: A Pirani sensor 1 is used in combination with a cold cathode electric dissociation sensor 3, and the output signals of these sensors 1, 3 are supplied to a weighting unit 5, and also to a measurement evaluating unit 7. The evaluating unit 7 produces an output signal A as a signal to represent a physical quantity (p). The intermediate value region ΔP is determined, and within the region, measurement is made about the transition range from the sensor 1 to the other 3. Also the output signal A of the unit 7 is supplied to the weighting unit 5, and a weighting function (f) is formed in the unit 5 in accordance with the sensor output signal and the output signal of the evaluating unit 7. Also an output signal in accordance with the sensor output signal and the function (f) is formed in the evaluating unit 7.
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Inventors:
Rudolph Stocker
Armin Leo Estekri
Martin boche
Armin Leo Estekri
Martin boche
Application Number:
JP31183794A
Publication Date:
November 10, 2004
Filing Date:
December 15, 1994
Export Citation:
Assignee:
Unaxis Balzers Akchen Gesell Shaft
International Classes:
G01L19/06; G01D3/024; G01L21/12; G01L21/34; (IPC1-7): G01L19/06; G01D3/024
Domestic Patent References:
| JP4258354A | ||||
| JP3197832A | ||||
| JP2266243A | ||||
| JP60046049U |
Attorney, Agent or Firm:
Takashi Ishida
Kenzo Hiraiwa
Toshio Toda
Masaya Nishiyama
Kenzo Hiraiwa
Toshio Toda
Masaya Nishiyama