Title:
波面の測定品質を評価する方法及びそのような方法を実現する装置
Document Type and Number:
Japanese Patent JP7149948
Kind Code:
B2
Abstract:
A method for evaluating the quality of the measurement of an optical wavefront, said measurement being obtained by means of a wavefront analyzer by direct measurement, the method comprising:the acquisition (10) of an optoelectronic signal for the measurement of the wavefront by means of a wavefront sensor, said sensor comprising a two-dimensional detector;the determination (11) on the basis of said optoelectronic signal of at least one parameter characteristic of a parasitic component of the optoelectronic signal;the evaluation (12) of a quality factor of the measurement of the wavefront as a function of said at least one parameter characteristic of the parasitic component of the signal;the display (13) to a user of a level of quality of the measurement as a function of said quality factor.
Inventors:
Lebec, Xavier
Application Number:
JP2019540542A
Publication Date:
October 07, 2022
Filing Date:
January 26, 2018
Export Citation:
Assignee:
Imagine Optic
International Classes:
G01M11/02; G01J9/02
Domestic Patent References:
| JP2016526985A | ||||
| JP2003511182A | ||||
| JP2016000139A | ||||
| JP8005505A | ||||
| JP2001050819A | ||||
| JP2015150815A |
Other References:
Optical Engineering,2013年,Vol.52 No.7,p.071413-1~071413-21
Attorney, Agent or Firm:
Morishita Kenki