Title:
キャビティに覆い被さった膜を備えるデバイスを製作する方法
Document Type and Number:
Japanese Patent JP7368057
Kind Code:
B2
Abstract:
A method for manufacturing a device comprising a membrane extending over a useful cavity, the method comprising: providing a generic structure comprising a surface layer extending in a main plane and arranged on a first face of a support substrate, the support substrate comprising elementary cavities opening under the surface layer and partitions delimiting each elementary cavity, the partitions having top surfaces that form all or part of the first face of the support substrate; defining a group of adjacent elementary cavities, such that a contour of the group of elementary cavities corresponds, in the main plane, to a contour of the useful cavity; and removing the partitions situated within the contour of the group of elementary cavities, in order to form the useful cavity, and to free the surface layer arranged above the useful cavity and forming the membrane.
Inventors:
Gislen, Bruno
Application Number:
JP2021532882A
Publication Date:
October 24, 2023
Filing Date:
December 12, 2019
Export Citation:
Assignee:
Soitec
International Classes:
B81C1/00; B81C3/00
Domestic Patent References:
| JP2005303325A | ||||
| JP11126910A |
Foreign References:
| WO2013027400A1 |
Attorney, Agent or Firm:
Ikeda Adult
Junichiro Sakamaki
Masakazu Noda
Junichiro Sakamaki
Masakazu Noda
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