Title:
METHOD FOR FABRICATING PATTERN
Document Type and Number:
Japanese Patent JP2014170973
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method for fabricating a pattern, more particularly, a method for fabricating a pattern using laser.SOLUTION: A method for fabricating a pattern includes: a first step for forming a metal organic ink layer (20) on a substrate; a second step for curing the metal organic ink layer (20) in semi-solid state; a third step in which the semi-solid metal organic ink layer (20) is irradiated with laser beam and the portion irradiated is cured in solid state to form a pattern; and a fourth step for removing the semi-solid metal organic ink layer (20) to leave only the pattern.
Inventors:
YANG MINYANG
KANG BON-CHOL
KANG BON-CHOL
Application Number:
JP2014129895A
Publication Date:
September 18, 2014
Filing Date:
June 25, 2014
Export Citation:
Assignee:
KOREA ADVANCED INST OF SCI TECHNOL
International Classes:
H05K3/08; H01B13/00; H01L21/288; H01L21/768; H05K3/26
Domestic Patent References:
| JPH03155004A | 1991-07-03 | |||
| JPH11307914A | 1999-11-05 | |||
| JPH11119431A | 1999-04-30 | |||
| JP2009004669A | 2009-01-08 |
Attorney, Agent or Firm:
Hidetada Kato
合路 Yusuke
Masateru Misaki
合路 Yusuke
Masateru Misaki