METHOD FOR FIXING CRUCIBLE ON HOLDING TABLE FOR SINGLE CRYSTAL-PULLING UP APPARATUS, ASSEMBLING UNIT FOR THE HOLDING TABLE TO BE USED FOR THE METHOD AND HOLDING TABLE

Japanese Patent JP3555326

B2

PROBLEM TO BE SOLVED: To enable the safe, easy and speedy performance of fixing a crucible to a holding table for a single crystal-pulling up apparatus by constituting the holding table for the crucible of divided two parts.
SOLUTION: A holding table 10 to hold a crucible 1 for storing a semiconductor raw material is made of two divided part of the bottom part 11 and a body part 12 to be engaged with the bottom part 11, and the holding table 10 is kept in a divided state. At first, the crucible 1 is placed on the bottom part 11, and subsequently the body part 12 is engaged with the bottom part 11 to assemble the holding table 10. Thus, the crucible is fixed on the holding table for the single crystal pulling up apparatus. The holding table is composed as follows: the table comprises a bottom part 11 and a body part 12 having an engaging hole to engage with the bottom part 11; the engaging surface 11a of the outer periphery of the bottom part 11 and the engaging surface 13a of the engaging hole 13 of the body part 12 are each consisting of an inclined surface 11b (13b) tapering downward.

Shoichi Yamazaki
Michio Yaba
Hiroaki Taguchi
Takashi Atami
Hisashi Furuya

JP12503196A

August 18, 2004

May 20, 1996

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Mitsubishi Sumitomo Silicon Co., Ltd.

C30B15/00; C30B15/10; C30B15/30; C30B29/06; H01L21/208; (IPC1-7): C30B15/00; C30B15/10; C30B29/06

JP6340491A
JP5072971U
JP5083698U

Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Akihiko Eguchi
Hideyuki Sugiura
Yasuhiko Murayama

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