Title:
METHOD OF FIXING SAMPLE
Document Type and Number:
Japanese Patent JPS63311738
Kind Code:
A
Abstract:
PURPOSE: To make it possible to fix a sample without damaging a parallelism in a vacuum by a method wherein, after an oil film is coated on a sample stand, the sample is pressed and fixed.
CONSTITUTION: When a sample is fixed on a sample stand 1, an oil film 10 is first coated on the stand 10. The film 10 is coated uniformly on the surface of the stand. After that, such the sample 3 as an Si wafer is held using a vacuum sucker 11 and so on to place on the film 10. Moreover, the sample 3 is pressed and fixed on the stand 1 through a pressing stand 13 by an air cylinder 12. Thereby, the sample 3 is fixed on the stand 1 by a fixing force due to an intermolecular bonding force.
Inventors:
SASAOKA TOSHIO
Application Number:
JP14752287A
Publication Date:
December 20, 1988
Filing Date:
June 12, 1987
Export Citation:
Assignee:
OMRON TATEISI ELECTRONICS CO
International Classes:
H01J37/20; H01L21/027; H01L21/30; H01L21/68; H01L21/683; (IPC1-7): H01J37/20; H01L21/30; H01L21/68
Attorney, Agent or Firm:
Yoshiki Okamoto