Title:
METHOD FOR FORMING CARBON NANOTUBE EMITTER, AND MANUFACTURING METHOD OF FIELD EMISSION DISPLAY ELEMENT USING IT
Document Type and Number:
Japanese Patent JP2005166675
Kind Code:
A
Abstract:
To provide a method for forming a carbon nanotube emitter, and a manufacturing method of field emission display element using it.
The method for forming a carbon nanotube emitter comprises steps of applying a photoresist on the upper surface of a substrate having an electrode formed thereon and patterning it to form a photoresist dot on the electrode; applying a carbon nanotube paste to the upper surface of the substrate so as to cover the photoresist dot; forming a carbon nanotube emitter on the electrode by a mutual diffusion caused between the photoresist dot and the carbon nanotube paste through a drying process; and removing the carbon nanotube paste covering the carbon nanotube emitter.
Inventors:
LEE HANG-WOO
PARK SHANG-HYEUN
PARK SHANG-HYEUN
Application Number:
JP2004352037A
Publication Date:
June 23, 2005
Filing Date:
December 03, 2004
Export Citation:
Assignee:
SAMSUNG SDI CO LTD
International Classes:
G03F7/032; G03F7/004; G03F7/32; G03F7/40; H01J1/304; H01J9/02; H01J9/04; H01J9/12; H01J31/12; H01J63/02; (IPC1-7): H01J9/02; G03F7/032; G03F7/40
Attorney, Agent or Firm:
Takashi Watanabe
Masatake Shiga
Yasuhiko Murayama
Shinya Mitsuhiro
Masatake Shiga
Yasuhiko Murayama
Shinya Mitsuhiro
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