To provide a conductive pattern formation method capable of forming a conductive pattern small in step difference on a substrate, and a conductive pattern substrate and a touch panel sensor obtained using this method.
A conductive pattern formation method of the present invention includes: a first exposure step of radiating active light in a patterned manner to a photosensitive layer including a photosensitive resin layer provided on a substrate and a conductive film provided on a surface of the photosensitive resin layer on a side opposite to the substrate; a second exposure step of radiating active light, in the presence of oxygen, to some or all of the portions of the photosensitive layer not exposed at least in the first exposure step; and a development step of developing the photosensitive layer to form a conductive pattern following the second exposure step.
IGARASHI YOSHIZO
Yoshinori Shimizu
Junichiro Sakamaki
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