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Title:
METHOD OF FORMING CONTACT HOLE
Document Type and Number:
Japanese Patent JPS62274694
Kind Code:
A
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Inventors:
NIITSUMA AKIRA
SAITO MASAYUKI
Application Number:
JP11796086A
Publication Date:
November 28, 1987
Filing Date:
May 22, 1986
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H05K3/00; H05K3/40; H05K3/46; (IPC1-7): H05K3/00; H05K3/40; H05K3/46
Domestic Patent References:
JPS59163888A1984-09-14
JPS58141594A1983-08-22
Attorney, Agent or Firm:
Takehiko Suzue



 
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