PURPOSE: To improve the adhesiveness of a fluoroalkyl acrylate film useful as a resist material, by treating the surface of a slicon wafer with a sliane coupling agent.

CONSTITUTION: A silicon compound represented by the formulaI(in the formula, Rf is a perfluoroalkyl-alkyl or per-fluoroalkyl-oxy-alkyl group, and at least one of R1, R2 and R3 is chlorine atom or a 1W5C alkoxy group, while the remainder is hydrogen atom, a 1W5C alkyl or hydroxyl group or Rf) is applied to the surface of a silicon wafer. Fluoroalkyl acrylate represented by the formula II (R4 is a methyl group in which at least one hydrogen atom may be optionally substituted with halogen atom, or halogen or hydrogen atom, R5 is a 1W6C hydrocarbon group, and R5 is a 1W15C alkyl group in which at least one hydrogen is substituted with fluorine atom) is then applied thereto.