METHOD FOR FORMING FINE CONDENSING LENS

Japanese Patent JP2003098649

A

To provide a method for forming a lens having a good design shape so as to attain high efficiency in condensing light, as for a method for forming a fine condensing lens on an image sensor part such as a CCD and a CMOS.

As for the method for forming the fine condensing lens on the light receiving part of the image sensor such as the CCD and the CMOS, a resist film is applied on a planarized layer formed on the light receiving part of the image sensor, and the resist film is exposed and developed via a photomask so as to attain the patterning of a lens shape, and the photomask is a transmissive type photomask with no light shielding layer, and the photomask is provided with a light-transmissive part, wherein the phase of transmitted light in each position is controlled at a prescribed width unit so as to obtain a desired light intensity distribution on the surface of a part to be exposed, and constituted of a light refractive medium having step parts on the surface part.

JP2016004208	IMAGING APPARATUS
JP2002025897	ILLUMINATING OPTICAL DEVICE, ALIGNER PROVIDED WITH THE ILLUMINATING OPTICAL DEVICE, AND MICRODEVICE MANUFACTURING METHOD USING THE ALIGNER
JP2002160223	APPARATUS FOR MOLDING MICRO-LENS ARRAY MOLD

TAKAHASHI YOICHI
TOYAMA NOBUTO
MATSUI HIROYUKI

JP2001292725A

April 04, 2003

September 26, 2001

Click for automatic bibliography generation  

DAINIPPON PRINTING CO LTD

G02B3/00; G03F1/00; G03F1/68; G03F7/20; H01L27/14; H01L27/148; H01L27/146; (IPC1-7): G03F1/08; G02B3/00; G03F7/20; H01L27/14

JPH04225278A	1992-08-14
JPH1059746A	1998-03-03
JP2000089014A	2000-03-31
JPH07106237A	1995-04-21

WO2000076002A1

2000-12-14

Satoshi Kanayama

Previous Patent: TRAY TYPE PROTECTIVE MEMBER, PACKAGE FOR SHEET-LIKE THERMALLY DEVELOPABLE PHOTOSENSITIVE MATERIAL, A...

Next Patent: PHOTOMASK, METHOD OF MANUFACTURING THE SAME AND METHOD OF FORMING MAGNETIZED PATTERN