To provide a method for forming a fine-particle film, which can form the film or a layer formed of nano-sized fine particles of an oxide with high accuracy.
The method for forming the fine-particle film includes: using a coaxial vacuum arc vapor-deposition source 13 having a cylindrical anode electrode 21, a cathode electrode 22 which is placed in the anode electrode 21 and has a vapor deposition material 22A, and a trigger electrode 23 which is placed in the anode electrode 21 so as to be separated from the cathode electrode 22; and vapor-depositing fine particles of the vapor deposition material 22A on the surface of an adherend 15 in an atmosphere in which a reactive gas (oxygen) is introduced in a vacuum tank 10. The nano-sized fine particles formed in the vacuum arc vapor-deposition source 13 react with oxygen to form the oxide. The oxide is vapor-deposited onto the adherend 15, and thereby, the film of the nano-sized fine-particles of the oxide can be formed with high accuracy.
YAMAGUCHI KOICHI
TSUKAHARA NAOKI
MURAKAMI HIROHIKO
| JP2007204810A | 2007-08-16 | |||
| JPH05132755A | 1993-05-28 | |||
| JP2006249558A | 2006-09-21 | |||
| JP2003282557A | 2003-10-03 | |||
| JP2000008159A | 2000-01-11 | |||
| JP2005105314A | 2005-04-21 | |||
| JP2004225107A | 2004-08-12 |
Ori Akira
Yasuo Iisaka