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Title:
METHOD FOR FORMING FINE STRUCTURE AND MOLD FOR NANOIMPRINT HAVING FINE STRUCTURE, AND METHOD OF PRODUCING PORUS ALUMINA COMPOSITE
Document Type and Number:
Japanese Patent JP2013057102
Kind Code:
A
Abstract:

To provide a method for producing a substrate having a fine structure in which the shape is controlled and which has a high aspect ratio in relation to depth.

A method for forming a fine structure is characterized by forming a fine structure having a cross-sectional shape corresponding to a resist pattern and an aspect ratio of 1 or more by forming a resist pattern on the surface of anodically oxidized porous alumina and then applying a wet etching treatment to the resulting porous alumina in order to selectively solve and remove parts where the resist pattern is not formed. A mold for nanoimprint has a fine structure formed by the method. A method for producing a porous alumina composite is characterized by forming a resist pattern on the surface of anodically oxidized porous alumina, then forming through-holes having a cross-sectional shape corresponding to the resist pattern by applying a wet etching treatment to the resulting porous alumina in order to selectively solve and remove parts where the resist pattern is not formed, and filling a substance different from alumina into the through-holes.


Inventors:
MASUDA HIDEKI
Application Number:
JP2011196169A
Publication Date:
March 28, 2013
Filing Date:
September 08, 2011
Export Citation:
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Assignee:
KANAGAWA KAGAKU GIJUTSU AKAD
International Classes:
C25D11/04; C23F1/02; C25D1/00; C25D11/18; C25D11/24
Domestic Patent References:
JP2009132974A2009-06-18
JP2006028604A2006-02-02
JP2002004079A2002-01-09
JP2010047454A2010-03-04
JP2009256751A2009-11-05
JP2006520697A2006-09-14
Foreign References:
WO2007023960A12007-03-01
Attorney, Agent or Firm:
Toshimitsu Ban
Koichi Hosoda