Title:
METHOD OF FORMING HILLOCK SUPPRESSING LAYER IN DOUBLE LAYER PROCESS AND ITS STRUCTURE
Document Type and Number:
Japanese Patent JPS60136337
Kind Code:
A
Inventors:
JIYATSUKU DEII SUMISU
Application Number:
JP11110984A
Publication Date:
July 19, 1985
Filing Date:
June 01, 1984
Export Citation:
Assignee:
MONORISHITSUKU MEMORY ZU INC
International Classes:
H01L23/52; H01L21/31; H01L21/3205; H01L21/768; H01L23/532; (IPC1-7): H01L21/88; H01L21/94
Attorney, Agent or Firm:
Sumio Takeuchi