Title:
METHOD OF FORMING MAGNETIC FILM, AND METHOD OF PRODUCING MAGNETIC RECORDING MEDIUM
Document Type and Number:
Japanese Patent JP2004323956
Kind Code:
A
Abstract:
To provide a method of forming a low-cost magnetic film having a uniform plane distribution in magnetic properties, reduced in the number of surface defects and having stable quality in high mass-productivity, and to provide a method of producing a magnetic recording medium.
In a target 400 forming a magnetic film 105 on both the sides of a substrate 101 by sputtering, till its service life is completed owing to its thickness in a consumption process, the erosion face 401 is subjected to additional working (cutting) almost parallel to the non-using face 403 on the back side for at least one time, so that indentations caused by erosion are reduced or eliminated, and the target 400 is reused.
Inventors:
Sakamoto, Koji
Matsuda, Yoshifumi
Matsuda, Yoshifumi
Application Number:
JP2003000124135
Publication Date:
November 18, 2004
Filing Date:
April 28, 2003
Export Citation:
Assignee:
HITACHI GLOBAL STORAGE TECHNOLOGIES INC
International Classes:
C23C14/34; G11B5/64; G11B5/66; G11B5/738; G11B5/851; H01F10/16; H01F41/18; C23C14/34; G11B5/62; G11B5/64; G11B5/66; G11B5/84; H01F10/12; H01F41/14; (IPC1-7): C23C14/34; G11B5/64; G11B5/66; G11B5/738; G11B5/851; H01F10/16; H01F41/18
