Title:
METHOD FOR FORMING METALLIC THIN FILM
Document Type and Number:
Japanese Patent JP2005298888
Kind Code:
A
Abstract:
To provide a method for forming a metallic thin film which is excellent in productivity without needing the maintenance, management or the like of a coating solution and a coating apparatus, and can easily form a metal thin film of homogeneous nano-size without being restricted by the shape on a work (substrate) side.
This method comprises: a step of preparing a prepared solution by dissolving or dispersing metal salt in a solvent; and a step of irradiating the prepared solution with microwaves in . A substrate is brought into contact with the prepared solution before or after irradiation of microwaves, thereby forming the metallic thin film composed of the metal in the metal salt directly on the surface of the substrate.
Inventors:
SATO HIDEYUKI
SHIZUKU FUMINARI
HIBINO SHINGO
YAMAMOTO TETSUSHI
WADA YUJI
YANAGIDA SHOZO
SHIZUKU FUMINARI
HIBINO SHINGO
YAMAMOTO TETSUSHI
WADA YUJI
YANAGIDA SHOZO
Application Number:
JP2004115947A
Publication Date:
October 27, 2005
Filing Date:
April 09, 2004
Export Citation:
Assignee:
TOKAI RUBBER IND LTD
KANSAI TLO KK
KANSAI TLO KK
International Classes:
C23C26/00; (IPC1-7): C23C26/00
Attorney, Agent or Firm:
Masahiko Nishito
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