To provide a method of forming a lattice-like pattern comprising minute thin groove patterns of a pitch of 1 nm to 1 mm or longer.

A processed section in which thin grooves are formed is pulse-driven, and the thin groove processing is controlled by controlling each drive energy. Since the lower limit of miniaturization of the processing is 1 nm, a higher order architecture is formed, and the processed section is easily prepared, and the processing linear velocity is high while the method has such a feature that can multi-process the portion to be processed, a wide or long workpiece machining is performed.