Title:
Si基板上への単分子膜の形成方法
Document Type and Number:
Japanese Patent JP4381690
Kind Code:
B2
More Like This:
| JP2009050835 | MICRO-COUNTERCURRENT EXTRACTION DEVICE |
| WO/2008/032198 | VARIABLE TUBE DIAMETER FOR METHANE STEAM REFORMER (SMR) |
| JP4138974 | Peep window |
Inventors:
Tetsu Yonezawa
Naoto Shirahata
Kunihito Kawamoto
Kazuki Kobayashi
Yoshiko Miura
Naoto Shirahata
Kunihito Kawamoto
Kazuki Kobayashi
Yoshiko Miura
Application Number:
JP2003026871A
Publication Date:
December 09, 2009
Filing Date:
February 04, 2003
Export Citation:
Assignee:
Japan Science and Technology Agency
International Classes:
B01J19/00; G01N33/547; B01J20/22; B05D1/20; C12M1/00; G01N27/327
Domestic Patent References:
| JP11128723A | ||||
| JP2002022745A |
Foreign References:
| WO1997041425A1 |
Attorney, Agent or Firm:
Mamoru Shimizu