Title:
METHOD FOR FORMING ORGANIC PYROELECTRIC PIEZOELECTRIC BODY
Document Type and Number:
Japanese Patent JP3594692
Kind Code:
B2
Abstract:
PURPOSE: To provide a method for forming an org. pyroelectric piezoelectric body excellent in pyroelectric piezoelectric properties by sufficiently executing poling treatment to a polymer film formed on a substrate kept at low temps.
CONSTITUTION: The raw-material monomers A and B capable of forming a polymer film are vaporized in vacuum to form a polymer film on a substrate 5 kept at low temps. A gas is then introduced into a vacuum treating chamber 1, a high electric field is impressed between an electrode set below the polymer film and an acicular electrode 12 arranged in front of the substrate 5 to heat the substrate, and the polymer film is poled. Consequently, while the polymer film is still in an oligomer state, the unreacted part is poled in the film when the unreacted part undergoes a reaction when the substrate is heated, and an org. pyroelectric piezoelectric body improved in pyroelectric and piezoelectric properties is easily and efficiently formed.
Inventors:
Takeshi Hattori
Masayuki Iijima
Masayuki Iijima
Application Number:
JP8572195A
Publication Date:
December 02, 2004
Filing Date:
April 11, 1995
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
G01J1/02; C23C14/12; H01L41/08; H01L41/45; (IPC1-7): C23C14/12; G01J1/02; H01L41/08; H01L41/26
Domestic Patent References:
| JP7011424A | ||||
| JP5311399A | ||||
| JP4362618A | ||||
| JP2284485A | ||||
| JP3048470A | ||||
| JP5335632A |
Attorney, Agent or Firm:
Kinichi Kitamura
Tashiro Sakuo
Etsuo Machida
Tashiro Sakuo
Etsuo Machida
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