PURPOSE: To easily form an organic pyroelectric and piezoelectric body excellent in heat resistance and insulating property by impressing a high electric field between a substrate and an electrode arranged in front of the substrate, depositing and polymeizing the plural vaporized raw monomers on the substrate.
CONSTITUTION: An acicular, wiry or reticular tantalum electrode 7 is arranged in front of a substrate 3 in a vacuum chamber 1 kept at a specified pressure. A voltage of about 3-10kV is impressed between the substrate 3 and the electrode 7 through a power source 8 to generate a high electric field. A diamine and a diisocyanate are put in the vaporization sources 6 as the raw monomers A and B for the polymer film, heated by a heater 5 and vaporized. A shutter 9 is then opened, and the vaporized materials are deposited on the substrate 3 and polymerized to form a polymer film. In this case, the polymer film under polymerization is polarized, and the dipole is oriented in the fixed direction. A polymer film of polyurea, etc., excellent in heat resistance and insulating property and having pyroelectric and piezoelectric properties is obtained in this way.
HATTORI TAKESHI