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Patent Searching and Data


Title:
METHOD FOR FORMING ORGANIC PYROELECTRIC AND PIEZOELECTRIC BODY
Document Type and Number:
Japanese Patent JPH05311399
Kind Code:
A
Abstract:

PURPOSE: To easily form an organic pyroelectric and piezoelectric body excellent in heat resistance and insulating property by impressing a high electric field between a substrate and an electrode arranged in front of the substrate, depositing and polymeizing the plural vaporized raw monomers on the substrate.

CONSTITUTION: An acicular, wiry or reticular tantalum electrode 7 is arranged in front of a substrate 3 in a vacuum chamber 1 kept at a specified pressure. A voltage of about 3-10kV is impressed between the substrate 3 and the electrode 7 through a power source 8 to generate a high electric field. A diamine and a diisocyanate are put in the vaporization sources 6 as the raw monomers A and B for the polymer film, heated by a heater 5 and vaporized. A shutter 9 is then opened, and the vaporized materials are deposited on the substrate 3 and polymerized to form a polymer film. In this case, the polymer film under polymerization is polarized, and the dipole is oriented in the fixed direction. A polymer film of polyurea, etc., excellent in heat resistance and insulating property and having pyroelectric and piezoelectric properties is obtained in this way.


Inventors:
IIJIMA MASAYUKI
HATTORI TAKESHI
Application Number:
JP11921292A
Publication Date:
November 22, 1993
Filing Date:
May 12, 1992
Export Citation:
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Assignee:
ULVAC CORP
International Classes:
C08J5/18; C23C14/12; G01J1/02; G01J5/02; G01J5/34; H01L37/02; H01L41/45; (IPC1-7): C23C14/12; C08J5/18; H01L41/26
Attorney, Agent or Firm:
Kinichi Kitamura (2 others)