Title:
METHOD OF FORMING PATTERN
Document Type and Number:
Japanese Patent JPS5651898
Kind Code:
A
Inventors:
SAITOU TAMIO
TAGAYA KIYOMI
NISHI YUUSAKU
TAGAYA KIYOMI
NISHI YUUSAKU
Application Number:
JP12839679A
Publication Date:
May 09, 1981
Filing Date:
October 04, 1979
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
H01L21/30; H01L21/027; H01L21/306; H01L23/52; H05K3/10; H05K3/46; (IPC1-7): H01L23/52; H05K3/46