PURPOSE: To form the shape of a photosensitive member structural body repeatedly with accuracy.

CONSTITUTION: A desensitization layer 18 is formed on the second principal face 14 of a photosensitive member 10 by applying a desensitizer. Next, light is selectively emitted to a first principal face 12 on the opposite side of the second principal face 14 using a masking agent. After that, a groove 32 is formed by etching using a phenomenon that the exposed area of the photosensitive member 10 subjected to light emission is etched at faster speed than the desensitized layer 18 whose etching speed is adequately low. Thus it is possible to form a bottom 38 having the same thickness as the desensitized layer 18 prepared previously in each groove 32.