To form a quantum dot with a high degree of accuracy at a desired position irrespective of the structure of a substrate surface.

By disposing a laser light source L for laser light having a stationary wave on a lateral side of a substrate W, and emitting the laser light along a surface of the substrate from the lateral side of the substrate W, the substrate surface is excited at intervals of half wavelength of the stationary wave of the laser light. By growing, to the substrate, a film different from a base film constituting the surface in lattice constant, a quantum dot is formed in a part Ex excited by the emission of the laser light.