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Title:
抵抗変化型不揮発性記憶装置およびメモリセルの形成方法
Document Type and Number:
Japanese Patent JPWO2011052239
Kind Code:
A
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Inventors:
Shunsaku Muraoka
Yoshihiko Kamisawa
Arboreal vegetation 剛
Kazuhiko Shimakawa
Application Number:
JP2010006453W
Publication Date:
March 14, 2013
Filing Date:
November 02, 2010
Export Citation:
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Assignee:
Panasonic incorporated company
International Classes:
C23C14/58; G11C13/00; C23C14/08; H01L49/00; C23C14/06; H01L27/105; H01L45/00; H01L21/316
Attorney, Agent or Firm:
新居 広守



 
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