To obtain a self-collective monomolecular film efficiently and effectively uniformly arrayed in a short time by energizing a base material itself in case of connecting one terminal of a power source to one end of a base material, connecting the other terminal of the power source to the other end of the material, and supplying a self-collective compound.

First, the surface of a base material 1 is immersed in a solution of a self-collective compound 2 in a container 20a, and the compound 2 is supplied to a surface of the material 1. At this time, one terminal of a power source 20b is connected to one end of the material 1, the other terminal is connected to the other end of the material 1 to energize the material 1. The compound 2 is arrayed and adsorbed to the surface of the material 1. As a result, an adsorption film of a monomolecular layer in which the compound 2 is arranged uniformly in a high density, i.e., the self-collective monomolecular film can be formed in a short time.