Title:
酸窒化シリコン膜の成膜方法及び弾性境界波装置の製造方法
Document Type and Number:
Japanese Patent JP5625648
Kind Code:
B2
Inventors:
西條 慎
Application Number:
JP2010200742A
Publication Date:
November 19, 2014
Filing Date:
September 08, 2010
Export Citation:
Assignee:
株式会社村田製作所
International Classes:
C23C14/06; C23C14/34; H01L21/316; H03H3/08; H03H9/145
Attorney, Agent or Firm:
Miyazaki Chikara
Kazutoshi Nakayama
Kazutoshi Nakayama