Title:
METHOD FOR FORMING TRANSPARENT DLC FILM ON SURFACE OF RESIN
Document Type and Number:
Japanese Patent JP2009001894
Kind Code:
A
Abstract:
To provide a method for forming a carbonaceous film on an insulator film such as a resin film without heating a target, and keeping transparency thereof.
A highly transparent diamond-like carbon film is formed by bringing mixed gas of carbon-containing gas and inert gas into a plasma state using a plasma generating part, extracting an ion beam from the plasma by an extraction electrode, accelerating the ion beam, and applying the ion beam to the target coated with silicon oxide so as to induce binding of carbon atoms and silicon oxide atoms.
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Inventors:
IKUJI FUMIYA
YAMAGUCHI KATSUYOSHI
KOYANAGI SHINYA
YAMAGUCHI KATSUYOSHI
KOYANAGI SHINYA
Application Number:
JP2007190173A
Publication Date:
January 08, 2009
Filing Date:
June 22, 2007
Export Citation:
Assignee:
OKUMA ENGINEERING KK
International Classes:
C23C16/27; C23C16/02
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