超音波振動子の形成方法、ならびに関連する装置

Title:

超音波振動子の形成方法、ならびに関連する装置

Document Type and Number:

Japanese Patent JP5876500

Kind Code:

B2

Abstract:

A method is provided for forming a piezoelectric ultrasonic transducer apparatus having a first electrode deposited on a dielectric layer disposed on a primary substrate. A piezoelectric material is deposited between the first electrode and a second electrode, to form a transducer device. At least the piezoelectric material is patterned such that a portion of the first electrode extends laterally outward therefrom. The primary substrate and the dielectric layer are etched to form a first via extending to the laterally outward portion of the first electrode, and a first conductive material is deposited to substantially fill the first via and form an electrically-conductive engagement with the laterally outward portion of the first electrode. The primary substrate is etched to define a second via extending therethrough, wherein the second via is laterally spaced apart from the first via. An associated method and apparatus are also provided.

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Inventors:

Dausch, david
Goodwin, Scott H.

Application Number:

JP2013542127A

Publication Date:

March 02, 2016

Filing Date:

November 30, 2011

Export Citation:

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