Title:
METHOD FOR FORMING UNIFORM ARRAY OF SHARP TIPS
Document Type and Number:
Japanese Patent JP2612153
Kind Code:
B2
Abstract:
PURPOSE: To provide a method for forming a substantially uniform array of atomically sharp emitter tips.
CONSTITUTION: This method includes a process for sectioning an array by pattern-disposing a substrate 11 together with masks 30, a process for forming tips 13 by executing isotropic etching on this array, and a process for removing the masks 30 at the point of time when substantially all of the tips have become sharp. The masks 30 have such composition and structure as they can remain with their balance kept on the apex of the tips 13 until all the tips 13 come to have substantially the same shape and are used for forming an array having substantially uniform tips 13.
Inventors:
David A Cathay
Kevin Tidjaden
Kevin Tidjaden
Application Number:
JP33759194A
Publication Date:
May 21, 1997
Filing Date:
December 28, 1994
Export Citation:
Assignee:
MICRON TECHNOLOGY,INCORPORATED
International Classes:
C23F4/00; H01J9/02; (IPC1-7): H01J9/02
Attorney, Agent or Firm:
Hiroaki Tazawa (1 person outside)