ジルコニア膜の成膜方法 - 有限会社渕田ナノ技研

Title:

ジルコニア膜の成膜方法

Document Type and Number:

Japanese Patent JP5649026

Kind Code:

B2

Inventors:

渕田英嗣

Application Number:

JP2009278601A

Publication Date:

January 07, 2015

Filing Date:

December 08, 2009

Export Citation:

Assignee:

有限会社渕田ナノ技研

International Classes:

C23C24/04; C03C17/23; C04B35/48; C04B41/87

Attorney, Agent or Firm:

Omori Junichi
折居 Chapter

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