PURPOSE: To accomplish glass sealing excellently by a method wherein a required glass is interposed between an Si disk with sensor elements formed and a Kovar shell, and is then made to flow by heating.
CONSTITUTION: The Si disk 3 with a pyrosensor 4, an FET5, resistors 6, and the like formed is placed on the shell 1 via glass 2, and then adhesion-sealed by the flow of the glass 2. The thickness of the glass 2 is approx. several μ, and the flow-point is selected at 900°C or less, and the coefficient of thermal expansion at 40W65×10-7/°C. Besides, the use of a glass molded body containing a particular binder having a grain size of 10W500 mesh is further effective. When glass-sealing is accomplished in this construction, a high adhesion strength of approx. 20kg/cm2 can be obtained, the characteristic of sealing is then improved. Besides, the moisture resistance is excellent, the heat resistance improves, and the mass productivity is excellent.
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