PURPOSE: To keep a liquid substance in a required minimum quantity on the surface of a square substrate with good thickness uniformity and in a state that the liquid substance is not scattered.

CONSTITUTION: A liquid substance L is flowed out in a state of a film flow from a slender slit-shaped opening part 4 which has been formed in a front plate for a rectangular parallelepiped box body 1 which constitutes an outflow nozzle, and the liquid substance is heaped on the surface of a substrate 9. The outflow nozzle is provided with a guide member 2 having a sliding face which has been swollen and curved to the obliquely upper part, with both end- regulation parts 5 formed at both ends in a first direction along the slicing face and with a laminar-flow formation member installed at the inside of the box body 1, and the outflow nozzle makes a prescribed film flow out from the opening part 4. The height of the opening part 4 is set at a prescribed value to achieve the film flow by taking into consideration the total amount of the liquid substance L to be heaped on the substrate 9, the viscosity of the liquid substance L and the like.