Title:
METHOD FOR INACTIVATING METALLIC SURFACE IN ORDER TO ENHANCE STABILITY OF GASEOUS HYDRIDE OF LOW CONCENTRATION IN CONTACT WITH METALLIC SURFACE
Document Type and Number:
Japanese Patent JP3162480
Kind Code:
B2
Abstract:
PURPOSE: To provide a method for inactivating a metallic surface in order to enhance the stability of a gaseous hydride of a low concn. in contact with this metallic surface.
CONSTITUTION: This method inactivates the metallic surface in order to enhance the stability of the gaseous hydride of the low concn. in contact with the metallic surface and include a) a stage for scavenging the gases in contact with the metallic surface with an inert gas and removing the scavenged gases; b) a stage for exposing the metallic surface to a prescribed mat. of the gaseous inactivating agent contg. a sufficient amt. of hydride of silicon, germanium, tin or lead and inactivating the metallic surface for a sufficient time and c) a state for scavenging the inactivating agent by using the inert gas.
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Inventors:
Yao-En Li
John Rizos
Gerhard Kasper
John Rizos
Gerhard Kasper
Application Number:
JP14071292A
Publication Date:
April 25, 2001
Filing Date:
June 01, 1992
Export Citation:
Assignee:
Rail Liquide Society Anonymous Pool Retude e Rex Prowation de Procede Georges Claude
International Classes:
C23C8/02; C23C8/06; C23C8/80; C23C10/06; C23C16/00; (IPC1-7): C23C10/06; C23C8/02
Other References:
【文献】英国特許出願公開1530337(GB,A)
Attorney, Agent or Firm:
Takehiko Suzue