Title:
METHOD AND INFORMATION PROCESSING SYSTEM FOR ROUGHNESS ANALYSIS
Document Type and Number:
Japanese Patent JP2023009475
Kind Code:
A
Abstract:
To enable highly accurate roughness analysis about one specific line pattern.SOLUTION: A method and information processing system generates one profile to be an object of roughness analysis from a measurement result of one specific line pattern, calculates a value of an HHCF (Height Height Correlation Function) about each of a plurality of lags r from the profile, calculates a roughness index obtained by correcting a component due to noise, a positive integer A and a noise portion included in the standard deviation of the profile by fitting each lag r and the value of the HHCF to the lag r to a model formula of an HHCF including noise defined by the component due to the noise, the positive integer A and the noise portion included in the standard deviation of the profile in an area with the lag r being a threshold or less, and calculates the value of the HHCF obtained by correcting the noise form the component due to the noise and the value of the HHCF included in the standard variation of the profile.SELECTED DRAWING: Figure 1
Inventors:
KIZU RYOSUKE
Application Number:
JP2021112800A
Publication Date:
January 20, 2023
Filing Date:
July 07, 2021
Export Citation:
Assignee:
AIST
International Classes:
H01L21/66; G01B15/04