To illuminate a solid-state imaging element with light for inspection of desired intensity, without the calibration work, and thereby reducing the inspection cost.
This inspection device is equipped with a light source device 10 for illuminating the solid-state imaging element 31, which is an inspecting object with a light 15 for inspection and a prober device 20 equipped with a probe card 22 for acquiring the output signal of the imaging element 31, by bringing a probe 22a into contact with a stage 21 for placing the imaging element 31 thereon and with the electrode pad of the imaging element 31. The imaging element 31 is inspected with a light sensor 25 provided in the prober device 20 for detecting the light 15 for illuminating the imaging element 31 and with a control means 14 provided for controlling the source device 10 according to a detection value of the sensor 25 to illuminate the imaging element 31 with the prescribed light 15.
Hironori Honda
Toshimitsu Ichikawa
Takeshi Takamatsu