To provide a method for installing multi-floor base-isolating equipment capable of inexpensively realizing partial base isolation without putting a structure of an existing building into disorder.
This multi-floor base-isolating equipment 300 is installed by firstly and partially removing a beam and a floor panel 50a for a floor of the fifth floor of the existing building 1, and subsequently make the most of a removed part of the floor of the fifth floor and a space below it, so as to provide a partially-base-isolated building 1'. The multi-floor base-isolating equipment 300 comprises: an upper floor 310; a lower floor 320 which is installed below the upper floor 310; a column 330 for connecting the upper and lower floors 310 and 320 together; and a base-isolating unit 340 which is installed in the lower section of the lower floor 320. In the installation of the multi-floor base-isolating equipment 300, a top surface of the remaining floor panel 50a of the fifth floor and that of the upper floor 310 are aligned with each other. In the partially-base-isolated building 1', a diffusion furnace 200 as a substrate treatment device is installed on the upper floor 310, and an accessory for the substrate treatment equipment is installed on the lower floor 320.
KAMINAGA KENICHI
KOJIMA MASUMI
NAITO YUKITAKA
ONO SHIGERU
NAKAMURA TAKESHI
EBIHARA KAZUO
