Title:
METHOD FOR LEADING AIR INTO CLEAN ROOM, CLEAN ROOM, METHOD FOR LEADING AIR INTO LOCAL EQUIPMENT, AND LOCAL EQUIPMENT
Document Type and Number:
Japanese Patent JP3273544
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To keep the inside of a clean room from contamination with inorganic matter.
SOLUTION: In the ceiling of a clean room 1 a series of non-glass-based air filters 21A are disposed in the right part as shown in diagram and a series of glass-based air filters 21B, in the left part. By means of a ceiling chamber- partitioning board 4 and an under-the-floor-partitioning board 5 the course by which air is led into the clean room 1 is divided into a non-glass-based air filter side area 6A and a glass-based air filter side area 6B. The velocity V1 at which the air is blown out from the non-glass-based air filters 21A is made greater than the velocity V2 at which the air is blown out from the glass- based air filters 21B.
More Like This:
Inventors:
Sadao Kobayashi
Yoshihide Wakayama
Masayuki Imafuku
Yoshihide Wakayama
Masayuki Imafuku
Application Number:
JP20061496A
Publication Date:
April 08, 2002
Filing Date:
July 30, 1996
Export Citation:
Assignee:
Taisei Corporation
International Classes:
E04B1/70; B01D46/00; B01D46/52; B01L1/04; E04F17/04; E04H5/02; F24F3/044; F24F7/06; H01L21/02; (IPC1-7): B01D46/00; B01D46/52; B01L1/04; E04B1/70; E04F17/04; F24F3/044; F24F7/06; H01L21/02
Domestic Patent References:
| JP6302487A | ||||
| JP261414U |
Attorney, Agent or Firm:
Tetsuya Mori (2 others)
Previous Patent: GROUND DEVICE FOR VEHICULAR CONTROL AND VEHICULAR CONTROL DEVICE
Next Patent: COVER STORAGE CASE
Next Patent: COVER STORAGE CASE