To realize a laser beam machine capable of, against a position error of machining, detecting a machining position of a work in preceding a laser beam irradiation position, detecting the machining position irrespective to a state/direction of the machining position, correcting the position and conducting laser beam machining.
A detection laser beam from a laser beam diode 70 is converged, through a polarizing prism 72, an image forming lens 73, a 1/4 wave length plate 74, a wedge base plate 75, a parallel flat face base plate 76, a diechroic mirror 40, a converging lens 41, to the position on a work 1 at a distance from a center axis O. The detection laser beam reflected from the work 1 is converged on a photo sensor 71 at the same route as an incident beam. By rotating the base plates 75, 76, the irradiation position of the detection laser beam on the work 1 is revolved around the center axis O at the position apart in a distance L1. By this method, a butting face is detected in preceding the machining laser beam. and position correction is conducted.
SHIMOMURA YOSHIAKI
MINOMOTO YASUSHI
SAKURAI SHIGEYUKI
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