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Title:
METHOD FOR MAKING SURFACE OF POROUS MEMBER DENSE
Document Type and Number:
Japanese Patent JPS6024372
Kind Code:
A
Abstract:

PURPOSE: To provide a stable dense surface to an arbitrary place of the surface of a porous member by heating only the porous surface part of the member to be made dense, feeding a gas for a CVD reaction to the heated part through the pores, and depositing a solid phase.

CONSTITUTION: When a porous ceramic member 1 having open pores in at least the surface layer is not electrically conductive, the part of the member to be made dense is coated with carbon 2 to about 10μm thickness, and an alternating magnetic field is impressed with a high frequency coil 3 to heat the part to the deposition temp. of a CVD reaction. A gas for the CVD reaction is fed to the heated part through the open pores, and a solid phase 5 is deposited by the CVD reaction to make the surface of the part dense.


Inventors:
DEGAWA TOORU
Application Number:
JP13309883A
Publication Date:
February 07, 1985
Filing Date:
July 21, 1983
Export Citation:
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Assignee:
MITSUI SHIPBUILDING ENG
International Classes:
C23C16/30; C23C16/04; C23C16/32; C23C16/44; (IPC1-7): C23C16/30
Domestic Patent References:
JPS5328872A1978-03-17
Attorney, Agent or Firm:
Tsuyoshi Shigeno