To provide a method of manufacturing an aluminum nitride substrate by which the occurrence of color shading or stain is suppressed.
The method of manufacturing an aluminum nitride substrate is provided with a sintering process for sintering a formed body at a prescribed sintering temperature TS to obtain a sintered compact and an annealing process for annealing the sintered compact at a prescribed annealing temperature TA. In the annealing process, the sintered compact is heated to a prescribed annealing temperature TA, kept at the annealing temperature TA for a prescribed time and cooled from the annealing temperature TA. The annealing temperature is fixed to satisfy the relation of TA≤TS and a temperature rising rate in the heating of the sintered compact from 1,200°C to the annealing temperature TA is ≤200°C/hr and a temperature dropping rate in the cooling of the sintered compact from the annealing temperature TA to 1,200°C is ≤200°C/hr.
HITOMI ATSUSHI
KAWAGUCHI YUKIO
IINO MINORU
Shiro Terasaki
Hiroaki Aoki
Takashi Mikami
Next Patent: ANTIBACTERIAL GLASS FINE SPHERE AND MANUFACTURING METHOD THEREFOR