To reduce adsorption of oxygen on and oxidation of a catalyst on taking out the catalyst from a physical vapor deposition apparatus after causing metal particles to be supported and deposited on a support of the catalyst in manufacturing the catalyst by physical vapor deposition method.

The method comprises the steps of causing metal particles to be supported and deposited on the support composed of a conductive powder, e.g. a carbon support, by physical vapor deposition followed by purging with a gas-phase adsorption medium having high adsorption to the support and being inert to the catalyst, e.g. carbon dioxide or water vapor, to eliminate the pressure difference between the inside and the outside of a physical vapor deposition apparatus 2.

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