Title:
METHOD OF MANUFACTURING CATHODE HAVING ARRANGED EXTRACTED GRIDS AND COLLECTED GRIDS
Document Type and Number:
Japanese Patent JP3960036
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To accurately dispose the openings of extracted grids and collected grids formed on the upper surface of a cathode.
SOLUTION: This production method for a structure comprises the steps of forming, on a substrate, a first insulation layer, a first metal-covered layer, a second insulation layer, and a second metal-covered layer stacked each other, forming a first window corresponding to the profile of a first opening and a second window having an external profile corresponding to the internal profile of a second opening on the second metal-covered layer and the second insulation layer, forming a third window larger than the first window in a masking layer, etching the first metal-covered layer in the first window, removing the second metal-covered layer under the masking layer to the inner periphery of the second window, etching the first insulation layer by a selected distance and removing the second insulation layer in the profile line of the second window, and removing the masking layer.
Inventors:
Christoph Bulsho
Application Number:
JP2001389100A
Publication Date:
August 15, 2007
Filing Date:
December 21, 2001
Export Citation:
Assignee:
COMPAGNIE GENERALE DES MATIERES NUCLEAIRES
International Classes:
H01J9/02; (IPC1-7): H01J9/02
Domestic Patent References:
| JP9283009A |
Foreign References:
| WO1999062093A1 |
Attorney, Agent or Firm:
Keiichi Yamamoto