Title:
METHOD FOR MANUFACTURING CERAMIC GREEN SHEET
Document Type and Number:
Japanese Patent JP2006179633
Kind Code:
A
Abstract:
To provide a method for processing a ceramic green sheet which strikes a balance between mold-releasing property of a green sheet and adhesion of a resist pattern.
The method includes a step to form at least a positive resist adhesion layer on a substrate processed for mold release, a step to form a pattern using a positive resist on a member on which the positive resist adhesion layer is formed, a step to form an insulator material layer on a member on which the pattern is formed, and a step to apply dissolving treatment to a member on which the insulator material layer is formed.
Inventors:
YOSHIDA MASAYUKI
AOKI SHUNJI
SUDO JUNICHI
AOKI SHUNJI
SUDO JUNICHI
Application Number:
JP2004370409A
Publication Date:
July 06, 2006
Filing Date:
December 22, 2004
Export Citation:
Assignee:
TDK CORP
International Classes:
H05K3/00; B28B1/30; B28B11/00; H01F41/04; H01G4/12; H01G4/30; H01G13/00
Attorney, Agent or Firm:
Masao Okabe
Nobuaki Kato
Kazuo
Okabe
Shinichi Usui
Takao Ochi
Teruhisa Motomiya
Seiichiro Takahashi
Koji Yoshizawa
Takao Matsui
Masami Saito
Nobuaki Kato
Kazuo
Okabe
Shinichi Usui
Takao Ochi
Teruhisa Motomiya
Seiichiro Takahashi
Koji Yoshizawa
Takao Matsui
Masami Saito
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