Title:
METHOD OF MANUFACTURING COMPOSITION FOR FERROELECTRIC THIN FILM FORMATION
Document Type and Number:
Japanese Patent JP2007200588
Kind Code:
A
Abstract:
To provide a method of manufacturing a composition for ferroelectric thin film formation excelling in storage stability and uniformity of a film in applying and drying it.
Metallic alkoxide, metallic acetate, metal acetylacetonate salt, amines and an alcohol solvent are mixed, this mixture 1 is heated by using a distillation column 3, and refluxed while removing a part of an evaporant, and water is replenished, whereby a colloid solution for an MOD method is formed.
COPYRIGHT: (C)2007,JPO&INPIT
Inventors:
KAMEI HIROYUKI
Application Number:
JP2006014665A
Publication Date:
August 09, 2007
Filing Date:
January 24, 2006
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H01B19/00; H01B3/00; H01L21/316; H01L41/18; H01L41/187; H01L41/317; H01L41/39
Attorney, Agent or Firm:
Hiroyuki Kurihara
Muranaka
Muranaka
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