Title:
化合物半導体結晶の製造方法
Document Type and Number:
Japanese Patent JP5152128
Kind Code:
B2
Inventors:
Koji Otakara
Masachi Shibata
Masachi Shibata
Application Number:
JP2009197756A
Publication Date:
February 27, 2013
Filing Date:
August 28, 2009
Export Citation:
Assignee:
Hitachi Cable Ltd.
International Classes:
C30B15/10; C30B27/02
Domestic Patent References:
| JP2009023867A | ||||
| JP2066680U | ||||
| JP2006327879A |
Attorney, Agent or Firm:
Toru Yui
Hitoshi Kiyono
Fukuoka Masahiro
Hitoshi Kiyono
Fukuoka Masahiro